| 000 | 00357nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 170101s2017 xx 000 0 und d | ||
| 082 | _a621.381 705 M58 | ||
| 245 | 0 | _aMicroelectronics fabrication equipment | |
| 260 | _bOxford | ||
| 650 | _aMINIATURE ELECTRONIC EQUIPMENT - YEARBOOKS | ||
| 653 | _aMINIATURE ELECTRONIC EQUIPMENT - YEARBOO | ||
| 942 |
_2ddc _cB |
||
| 999 |
_c21351 _d21351 |
||