000 00368nam a2200145Ia 4500
008 170101s1965 xx 000 0 und d
082 _a621.55 L54F
100 _aLEWIN, Gerhard
245 0 _aFundamentals of vacuum science and technology
260 _bN.Y.
_c1965
300 _a248p
650 _aVACUUM TECHNOLOGY
653 _aVACUUM TECHNOLOGY
942 _2ddc
_cB
999 _c24280
_d24280