000			00343nam a2200145Ia 4500
008			170101s1966 xx 000 0 und d
082			_a621.55 D44L
100			_aDIELS, K.
245		0	_aLeybold vacuum handbook
260			_bOxford _c1966
300			_a360p
650			_aVACUUM TECHNOLOGY
653			_aVACUUM TECHNOLOGY
942			_2ddc _cB
999			_c35177 _d35177